000 00280nam a2200121Ia 4500
008 200701s2009 xx 000 0 eng d
100 _aHSU Tai Ram
245 0 _aMEMS and Microsystems Design and Manufactures
250 _a1st
260 _bTMH
300 _a436
942 _2ddc
_cGE
999 _c4117
_d4117