000 00281nam a2200109Ia 4500
008 200701s2010 xx 000 0 eng d
100 _achrls chaing
245 0 _adesign for manufacturing field for nano scles cmos
260 _bSPRING FIELD
_c2010
300 _a254
942 _2ddc
_cGE
999 _c4429
_d4429